Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8375889 | System and method for providing an improved shutter for use with a shadow tab mask | — | 2013-02-19 |
| 8335589 | System and method for calibrating a wafer handling robot and a wafer cassette | Christopher Qualey | 2012-12-18 |
| 8025269 | Chamber lid lifting apparatus | — | 2011-09-27 |
| 7933685 | System and method for calibrating a wafer handling robot and a wafer cassette | Christopher Qualey | 2011-04-26 |
| 7824500 | System and method for cleaning a reactor chamber of a pump exhaust abatement system | — | 2010-11-02 |
| 7114908 | Method and apparatus for stacking semiconductor wafers | Dennis Moffat MacDonald | 2006-10-03 |
| 6981594 | Method and apparatus to facilitate transport of semiconductor wafers | — | 2006-01-03 |