Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6091889 | Rapid thermal processor for heating a substrate | Jenn-Gwo Hwu, Kuo-Chung Lee, Chien-Lung Chen | 2000-07-18 |
| 5926615 | Temperature compensation method for semiconductor wafers in rapid thermal processor using separated heat conducting rings as susceptors | Jenn-Gwo Hwu, Kuo-Chung Lee | 1999-07-20 |