Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7758979 | Piezoelectric thin film, piezoelectric material, and fabrication method of piezoelectric thin film and piezoelectric material, and piezoelectric resonator, actuator element, and physical sensor using piezoelectric thin film | Morito Akiyama, Naohiro Ueno, Kazuhiko Kano, Akihiko Teshigahara, Yukihiro Takeuchi +1 more | 2010-07-20 |
| 7642693 | Wurtzite thin film, laminate containing wurtzite crystalline layer and their manufacturing methods | Morito Akiyama, Naohiro Ueno, Hiroshi Tateyama | 2010-01-05 |