Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879359 | Silicon carbide epitaxial wafer having a thick silicon carbide layer with small wrapage and manufacturing method thereof | Satoshi Segawa, Kazutoshi Kojima, Tomohisa Kato, Toshiyuki Ohno | 2020-12-29 |
| 10329689 | Silicon carbide epitaxial wafer and process for producing same | — | 2019-06-25 |
| 9587326 | Silicon carbide epitaxial wafer, method for manufacturing silicon carbide epitaxial wafer, device for manufacturing silicon carbide epitaxial wafer, and silicon carbide semiconductor element | Kazutoshi Kojima, Kentaro Tamura | 2017-03-07 |