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Patent #TitleCo-InventorsDate
9783881 Linear evaporation apparatus for improving uniformity of thin films and utilization of evaporation materials Shih-Chang Liang, Wei-Chieh Huang, Chao-Nan Wei, Hui-Yun Bor 2017-10-10
9574264 Method and apparatus for stably evaporation depositing uniform thin films Shih-Chang Liang, Wei-Chieh Huang, Chao-Nan Wei, Hui-Yun Bor 2017-02-21