Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7169019 | Method of monitoring surface status and life of pad by detecting temperature of polishing interface during chemical mechanical process | Yeau-Ren Jeng | 2007-01-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7169019 | Method of monitoring surface status and life of pad by detecting temperature of polishing interface during chemical mechanical process | Yeau-Ren Jeng | 2007-01-30 |