Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7138338 | Method and composite hard mask for forming deep trenches in a semiconductor substrate | Chang-Rong Wu, Yinan Chen | 2006-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7138338 | Method and composite hard mask for forming deep trenches in a semiconductor substrate | Chang-Rong Wu, Yinan Chen | 2006-11-21 |