Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131892 | Operating method of etching device | Feng-Ju Tsai | 2024-10-29 |
| 11329857 | Cellular network | Feng-Ju Tsai | 2022-05-10 |
| 11263755 | Alert device and alert method thereof | Feng-Ju Tsai | 2022-03-01 |
| 11227778 | Wafer cleaning apparatus and operation method of the same | Feng-Ju Tsai | 2022-01-18 |
| 11189509 | System and method for controlling semiconductor manufacturing equipment | Feng-Ju Tsai | 2021-11-30 |
| 11037805 | Wafer cleaning apparatus and method of cleaning wafer | Feng-Ju Tsai | 2021-06-15 |
| 10998218 | Wet cleaning apparatus and manufacturing method using the same | Feng-Ju Tsai | 2021-05-04 |
| 10916452 | Wafer drying equipment and method thereof | Feng-Ju Tsai | 2021-02-09 |