Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6117268 | Apparatus for carrying substrates processed in an etching process and protecting thereof from being dampened by droplets | Wen-Chi Hsu, Yinan Chen, Shang-Shu Chung, Jung-Hsing Chien, Chien-Hua Lee | 2000-09-12 |