Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7933015 | Mark for alignment and overlay, mask having the same, and method of using the same | Chui-Fu Chiu | 2011-04-26 |
| 7056631 | Exposure system and method with group compensation | Jen-Ho Chen | 2006-06-06 |
| 7046332 | Exposure system and method with group compensation | Jen-Ho Chen | 2006-05-16 |
| 6873399 | Exposure system and method | — | 2005-03-29 |