Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027037 | Method for evaluating microstructures on a workpiece based on the orientation of a grating on the workpiece | Mike Littau, Darren Forman, Steven G. Hummel | 2011-09-27 |
| 7656542 | Method for evaluating microstructures on a workpiece based on the orientation of a grating on the workpiece | Mike Littau, Darren Forman, Steven G. Hummel | 2010-02-02 |
| 7615752 | Apparatus and method for enhanced critical dimension scatterometry | Steve Hummel | 2009-11-10 |
| 7511293 | Scatterometer having a computer system that reads data from selected pixels of the sensor array | Steve Hummel | 2009-03-31 |
| 7502101 | Apparatus and method for enhanced critical dimension scatterometry | Steve Hummel, Sean Liu | 2009-03-10 |
| 6099299 | Support attachment and cigarette lighter safety device | Lynn Raymond, LaRue Birmingham | 2000-08-08 |