Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7691541 | Methods for additive repair of phase shift masks by selectively depositing nanometer-scale engineered structures on defective phase shifters | Sylvain Cruchon-Dupeyrat, Linette Demers, Robert Elghanian, Sandeep Disawal, Nabil Amro +1 more | 2010-04-06 |