Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9391002 | Semiconductor sensor chips | — | 2016-07-12 |
| 9034666 | Method of testing of MEMS devices on a wafer level | Vladimir Vaganov | 2015-05-19 |
| 8644125 | Seek scan probe (SSP) cantilever to mover wafer bond stop | Tsung-Kuan A. Chou, John Heck | 2014-02-04 |
| 8618934 | Autonomous sensing module, a system and a method of long-term condition monitoring of structures | Olga V Belova | 2013-12-31 |
| 8183077 | Force input control device and method of fabrication | Vladimir Vaganov | 2012-05-22 |
| 7928522 | Arrangements for and fabrication of mechanical suspension of a movable structure | Terry Zhu | 2011-04-19 |
| 7880247 | Semiconductor input control device | Vladimir Vaganov | 2011-02-01 |
| 7791151 | Force input control device and method of fabrication | Vladimir Vaganov | 2010-09-07 |
| 7659182 | Method of wafer-to-wafer bonding | Vladimir Vaganov | 2010-02-09 |
| 7476952 | Semiconductor input control device | Vladimir Vaganov | 2009-01-13 |
| 7463573 | Patterned media for a high density data storage device | Zhaohui Fan | 2008-12-09 |
| 7367119 | Method for forming a reinforced tip for a probe storage device | — | 2008-05-06 |
| 7367232 | System and method for a three-axis MEMS accelerometer | Vladimir Vaganov | 2008-05-06 |
| 7318349 | Three-axis integrated MEMS accelerometer | Vladimir Vaganov | 2008-01-15 |
| 7309630 | Method for forming patterned media for a high density data storage device | Zhaohui Fan | 2007-12-18 |