Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195850 | Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activated atomic layer deposition (PEALD/PAALD) | — | 2025-01-14 |
| 12197125 | Mask and reticle protection with atomic layer deposition (ALD) | — | 2025-01-14 |
| 12180586 | Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activated atomic layer deposition (PEALD/PAALD) | — | 2024-12-31 |
| 11640900 | Electron cyclotron rotation (ECR)-enhanced hollow cathode plasma source (HCPS) | — | 2023-05-02 |
| 11087959 | Techniques for a hybrid design for efficient and economical plasma enhanced atomic layer deposition (PEALD) and plasma enhanced chemical vapor deposition (PECVD) | — | 2021-08-10 |
| 10366898 | Techniques and systems for continuous-flow plasma enhanced atomic layer deposition (PEALD) | — | 2019-07-30 |
| 10361088 | Techniques and systems for continuous-flow plasma enhanced atomic layer deposition (PEALD) | — | 2019-07-23 |
| 9972501 | Techniques and systems for continuous-flow plasma enhanced atomic layer deposition (PEALD) | — | 2018-05-15 |
| 6730176 | Single wafer megasonic cleaner method, system, and apparatus | — | 2004-05-04 |
| 4742233 | Method and apparatus for automated reading of vernier patterns | — | 1988-05-03 |
| 4644576 | Method and apparatus for producing x-ray pulses | — | 1987-02-17 |
| 4635855 | Method and apparatus for rapidly controlling the flow of gas | Paul Sinclair | 1987-01-13 |
| 4537813 | Photomask encapsulation | — | 1985-08-27 |
| 4499162 | Photomask and method of using same | Edward L. Banks, Thomas S. Ellington, IV | 1985-02-12 |
| 4496425 | Technique for determining the end point of an etching process | — | 1985-01-29 |
| 4333814 | Methods and apparatus for improving an RF excited reactive gas plasma | — | 1982-06-08 |
| 4282267 | Methods and apparatus for generating plasmas | — | 1981-08-04 |