Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6744211 | Plasma density information measuring method, probe used for measuring plasma density information, and plasma density information measuring apparatus | Hideo Sugai, Naoki Toyoda | 2004-06-01 |
| 6339297 | Plasma density information measuring method, probe used for measuring plasma density information, and plasma density information measuring apparatus | Hideo Sugai, Naoki Toyoda | 2002-01-15 |
| 6184623 | Method for controlling plasma-generating high frequency power, and plasma generating apparatus | Hideo Sugai, Naoki Toyoda | 2001-02-06 |