Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776723 | Drive unit for gate valve | Mie Kimura | 2023-10-03 |
| 11629796 | Vacuum valve and actuator used in vacuum valve | — | 2023-04-18 |
| 10606288 | Pressure control method for process chamber and pressure control device for process chamber | Mie Kimura | 2020-03-31 |
| 9880569 | Pressure control method for process chamber and pressure control device for process chamber | Mie Kimura | 2018-01-30 |
| 6814096 | Pressure controller and method | William Ballard, David Kruse, Sean Mallory, Per Cederstav | 2004-11-09 |
| 6714878 | System and method for a digital mass flow controller | — | 2004-03-30 |
| 6612331 | Pressure controller and method | Per Cederstav, Sean Mallory, William Ballard, David Kruse | 2003-09-02 |
| 6445980 | System and method for a variable gain proportional-integral (PI) controller | — | 2002-09-03 |
| 6389364 | System and method for a digital mass flow controller | — | 2002-05-14 |