Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4915779 | Residue-free plasma etch of high temperature AlCu | G. Scot Srodes, John L. Freeman, Jr., Andrew G. Nagy | 1990-04-10 |
| 4621045 | Pillar via process | — | 1986-11-04 |
| 4523372 | Process for fabricating semiconductor device | Raymond J. Balda, Yefim Bukhman | 1985-06-18 |
| 4222839 | Workpiece holder and method for plasma reactor apparatus | Joseph Pao Yung Kao | 1980-09-16 |