Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4568410 | Selective plasma etching of silicon nitride in the presence of silicon oxide | — | 1986-02-04 |
| 4560436 | Process for etching tapered polyimide vias | Yefim Bukhman | 1985-12-24 |