Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5703493 | Wafer holder for semiconductor applications | Anthony R. Weeks, Mark D. Norris | 1997-12-30 |
| 5578167 | Substrate holder and method of use | Kathirgamasundaram Sooriakumar, Kenneth E. Stegall, Thomas J. Dunlap, Colleen M. Albrecht | 1996-11-26 |