Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4590024 | Silicon deposition process | Israel A. Lesk, Kalluri R. Sarma | 1986-05-20 |
| 4555303 | Oxidation of material in high pressure oxygen plasma | Ronald N. Legge, Kalluri R. Sarma | 1985-11-26 |
| 4370288 | Process for forming self-supporting semiconductor film | Ronald N. Legge | 1983-01-25 |
| 4321246 | Polycrystalline silicon production | Kalluri R. Sarma, I. Arnold Lesk, Roger G. Nikirk | 1982-03-23 |
| 4309259 | High pressure plasma hydrogenation of silicon tetrachloride | Kalluri R. Sarma | 1982-01-05 |
| 4292342 | High pressure plasma deposition of silicon | Kalluri R. Sarma, I. Arnold Lesk | 1981-09-29 |