Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5286581 | Phase-shift mask and method for making | — | 1994-02-15 |
| 5273850 | Chromeless phase-shift mask and method for making | Thomas E. Zirkle | 1993-12-28 |
| 5147812 | Fabrication method for a sub-micron geometry semiconductor device | James G. Gilbert, Thomas E. Zirkle | 1992-09-15 |