Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4717446 | Method of detecting the endpoint of the etch of epitaxially grown silicon | Andrew G. Nagy, Clarence J. Tracy | 1988-01-05 |
| 4585517 | Reactive sputter cleaning of semiconductor wafer | — | 1986-04-29 |