Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6568988 | Chemical mechanical polishing apparatus with stable signals | Hua-Jen Tseng, Chun-Chieh Lee, Dong-Tay Tsai | 2003-05-27 |
| 6334258 | Inspection device for examining a piece of aperture graphite of an extraction electrode | Chun-Chieh Lee, Hua-Jen Tseng, Dong-Tay Tsai | 2002-01-01 |
| 6149078 | Slurry nozzle | Dong-Tay Tsai, Hua-Jen Tseng, Chun-Chieh Lee | 2000-11-21 |
| 6099386 | Control device for maintaining a chemical mechanical polishing machine in a wet mode | Pei Wei Tsai, Huan-Jen Tseng, Chih-Hsien Chang | 2000-08-08 |