Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6241597 | Cleaning apparatus for maintaining semiconductor equipment | Wen-Pin Hsieh | 2001-06-05 |
| 6228776 | Ashing process by adjusting etching endpoint and orderly stepped positioning silicon wafer | — | 2001-05-08 |
| 6069088 | Method for prolonging life time of a plasma etching chamber | Wen-Pin Hsieh | 2000-05-30 |