Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842911 | Wafer stress control using backside film deposition and laser anneal | Pengan Yin, Siping Hu, Lina Miao | 2023-12-12 |
| 6358676 | Method for reworking photoresist | — | 2002-03-19 |