Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403489 | Method for removing polymer stacked on a lower electrode within an etching reaction chamber | Tien-Min Yuan, Shih-Chi Lai, Kuo-tsai Kao | 2002-06-11 |
| 6299788 | Silicon etching process | Tien-Min Yuan, Shih-Chi Lai | 2001-10-09 |
| 6273962 | Method to reduce the particles in load-lock chamber | Jia-Rurng Hwu, Tien-Min Yuan, Shih-Chi Lai | 2001-08-14 |
| 6113736 | Gas ring apparatus for semiconductor etching | Shih-Tung Lan, Sheng-Kai Chang, Shih-Chi Lai | 2000-09-05 |