Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6736696 | Method of improving uniformity control on wafers during chemical mechanical polishing | Cheng-An Peng | 2004-05-18 |
| 6020259 | Method of forming a tungsten-plug contact for a semiconductor device | Hsi-Chieh Chen, Wen-Cheng Tu, Kuo-Lun Tseng | 2000-02-01 |
| 5804091 | Method of preventing defects and particles produced after tungsten etch back | Yung-Tsun Lo, Chi Hen Lin, Jyh Ming Jih | 1998-09-08 |