Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8480862 | Ozone system for multi-chamber tools | Thomas J. Ryan | 2013-07-09 |
| 7892502 | Ozone system for multi-chamber tools | Thomas J. Ryan | 2011-02-22 |
| 5932180 | Ozone and other reactive gas generator cell and system | Xinyu Zhang, Donald K. Smith | 1999-08-03 |