Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846074 | System for and method of monitoring flow through mass flow controllers in real time | — | 2017-12-19 |
| 9557744 | System for and method of monitoring flow through mass flow controllers in real time | — | 2017-01-31 |
| 9471066 | System for and method of providing pressure insensitive self verifying mass flow controller | Michael L'Bassi | 2016-10-18 |
| 9348339 | Method and apparatus for multiple-channel pulse gas delivery system | Scott Benedict, Jaroslaw Pisera | 2016-05-24 |
| 9127361 | Methods of and apparatus for controlling pressure in multiple zones of a process tool | — | 2015-09-08 |
| 8997791 | Multiple-channel flow ratio controller | Michael L'Bassi, David D'Entremont | 2015-04-07 |
| 8997686 | System for and method of fast pulse gas delivery | — | 2015-04-07 |
| 8849466 | Method of and apparatus for multiple channel flow ratio controller system | — | 2014-09-30 |
| 8793082 | Upstream volume mass flow verification systems and methods | Kaveh Zarkar | 2014-07-29 |
| 8386083 | Systems and methods for updating valve cracking current in mass flow controllers | — | 2013-02-26 |
| 8079383 | Controller gain scheduling for mass flow controllers | — | 2011-12-20 |
| 7891228 | Dual-mode mass flow verification and mass flow delivery system and method | Kaveh Zarkar | 2011-02-22 |
| 7757554 | High accuracy mass flow verifier with multiple inlets | Kaveh Zarkar | 2010-07-20 |
| 7706925 | Integrated pressure and flow ratio control system | Michael L'Bassi, Kaveh Zarkar, William R. Clark | 2010-04-27 |
| 7673645 | Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangement | Kaveh Zarkar | 2010-03-09 |
| 7621290 | Gas delivery method and system including a flow ratio controller using antisymmetric optimal control | John A. Smith, Kaveh Zarkar | 2009-11-24 |
| 7474968 | Critical flow based mass flow verifier | Kaveh Zarkar, Ali Shajii, Daniel Smith | 2009-01-06 |
| 7467027 | Compensation for thermal siphoning in mass flow controllers | Michael L'Bassi, Kaveh Zarkar | 2008-12-16 |
| 7461549 | Mass flow verifiers capable of providing different volumes, and related methods | Kaveh Zarkar | 2008-12-09 |
| 7296465 | Vertical mount mass flow sensor | Michael L'Bassi, Kaveh Zarkar | 2007-11-20 |