Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7603962 | Rotary type CVD film forming apparatus for mass production | Kenichi Hama, Tsuyoshi Kage, Takumi Kobayashi | 2009-10-20 |
| 7189290 | Method and device for cleaning raw material gas introduction tube used in CVD film forming apparatus | Kenichi Hama, Tsuyoshi Kage, Takumi Kobayashi | 2007-03-13 |