Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9994455 | Apparatus and method for manufacturing trichlorosilane and method for manufacturing polycrystalline silicon | Kazuki Mizushima, Makoto Urushihara | 2018-06-12 |
| 9468042 | Apparatus for producing trichlorosilane | Masami Miyake, Kazuki Mizushima, Naoya Murakami | 2016-10-11 |
| 9315895 | Apparatus for producing polycrystalline silicon | Takashi Miyazawa | 2016-04-19 |
| 8809746 | Apparatus for producing trichlorosilane and method for producing trichlorosilane | Masami Miyake | 2014-08-19 |
| 8663573 | Apparatus for producing trichlorosilane and method for producing trichlorosilane | Naoya Murakami | 2014-03-04 |
| 8491862 | Apparatus and method for producing trichlorosilane | Taner Akbay | 2013-07-23 |
| 8372346 | Apparatus for producing trichlorosilane | Kazuki Mizushima, Naoya Murakami, Masami Miyake | 2013-02-12 |
| 8168152 | Method for producing trichlorosilane and method for utilizing trichlorosilane | Kazuki Mizushima | 2012-05-01 |