Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7820007 | Silicon electrode plate for plasma etching with superior durability | Hideki Fujiwara, Kazuhiro Ikezawa, Hiroaki Taguchi, Naofumi Iwamoto, Toshinori Ishii | 2010-10-26 |