Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5130260 | Method of gettering unintentional mobile impurities in silicon wafer by using a damaged layer exposed to the reverse surface thereof | Hisaaki Suga, Yoshinobu Nakada, Kazuhiro Akiyama | 1992-07-14 |