Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8313577 | Apparatus for producing single crystal silicon | Teruhisa Kitagawa, Masaki Ito, Takanori Ito | 2012-11-20 |
| 8158072 | Analysis apparatus and analysis method of chlorosilanes | Masaki Itoh | 2012-04-17 |