Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5954929 | Deposition-preventing part for physical vapor deposition apparatuses | Naoki Uchiyama, Makoto Kinoshita, Yorishige Hashimoto | 1999-09-21 |
| 5435965 | Sputtering target and method for manufacturing same | Jun Tamura | 1995-07-25 |
| 5338425 | Target units | Akifumi Mishima, Jun Tamura | 1994-08-16 |