Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10883169 | Sputtering target and method for producing sputtering target | Shoubin Zhang, Yuya Mutsuda | 2021-01-05 |
| 10283332 | Cu—Ga binary alloy sputtering target and method of producing the same | Shoubin Zhang | 2019-05-07 |
| 9988710 | Sputtering target and method for producing same | Shoubin Zhang, Masahiro Shoji | 2018-06-05 |
| 9934949 | Sputtering target and production method of the same | Shoubin Zhang, Masahiro Shoji | 2018-04-03 |
| 9607812 | Sputtering target and method for producing same | Shoubin Zhang, Masahiro Shoji | 2017-03-28 |