Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6693286 | Method for evaluating the quality of a semiconductor substrate | Takeshi Hasegawa, Hiroyuki Shiraki | 2004-02-17 |
| 6534774 | Method and apparatus for evaluating the quality of a semiconductor substrate | Takeshi Hasegawa, Hiroyuki Shiraki | 2003-03-18 |