Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5405447 | Plasma CVD apparatus | Masayoshi Murata, Yoshiaki Takeuchi, Masaru Kodama, Satoshi Uchida | 1995-04-11 |
| 5261962 | Plasma-chemical vapor-phase epitaxy system comprising a planar antenna | Satoshi Uchida, Masayoshi Murata, Yoshiaki Takeuchi, Masaru Kodama | 1993-11-16 |