Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8765002 | Substrate processing apparatus and substrate processing method | Kenji Yamada, Hiroyuki Araki, Koji Ando | 2014-07-01 |
| 7767585 | Method of cleaning and process for producing semiconductor device | Koichiro Saga, Kenji Yamada, Yuji Murata | 2010-08-03 |
| 7670496 | Process for producing structural body and etchant for silicon oxide film | Koichiro Saga, Hiroya Watanabe | 2010-03-02 |