Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10023797 | Liquid composition for etching oxides comprising indium, zinc, tin, and oxygen and etching method | Mari Shigeta | 2018-07-17 |
| 9824899 | Etching liquid for oxide containing zinc and tin, and etching method | Mari Shigeta | 2017-11-21 |
| 9644274 | Etching solution for copper or a compound comprised mainly of copper | Satoshi Tamai, Satoshi Okabe | 2017-05-09 |
| 9580818 | Etching liquid for film of multilayer structure containing copper layer and molybdenum layer | Satoshi Tamai, Satoshi Okabe, Masahide Matsubara | 2017-02-28 |
| 9466508 | Liquid composition used in etching multilayer film containing copper and molybdenum, manufacturing method of substrate using said liquid composition, and substrate manufactured by said manufacturing method | Satoshi Tamai | 2016-10-11 |
| 9365934 | Liquid composition used in etching copper- and titanium-containing multilayer film, etching method in which said composition is used, method for manufacturing multilayer-film wiring, and substrate | Tomoyuki ADANIYA, Satoshi Tamai | 2016-06-14 |
| 9217106 | Etchant and etching process for oxides containing at least indium and gallium | Hidenori Takeuchi, Satoshi Okabe, Mari Usui | 2015-12-22 |