Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362184 | Semiconductor device, manufacturing method of semiconductor device, semiconductor manufacturing and inspecting apparatus, and inspecting apparatus | Takahiko Kato, Hiroshi Nakano, Haruo Akahoshi, Yuuji Takada, Yoshimi Sudo +3 more | 2016-06-07 |
| 8946895 | Semiconductor device, manufacturing method of semiconductor device, semiconductor manufacturing and inspecting apparatus, and inspecting apparatus | Takahiko Kato, Hiroshi Nakano, Haruo Akahoshi, Yuuji Takada, Yoshimi Sudo +3 more | 2015-02-03 |
| 6826971 | Fabrication method for sample to be analyzed | — | 2004-12-07 |
| 6452174 | Charged particle beam apparatus and method of controlling same | Kazuhito Honda | 2002-09-17 |
| 5780870 | Semiconductor device and a process of manufacturing the same | Hitoshi Maeda, Yuichi Yokoyama | 1998-07-14 |