Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6594182 | Semiconductor memory device having controlled impurity concentration profile, method for manufacturing thereof, and semiconductor manufacturing apparatus | — | 2003-07-15 |
| 6287984 | Apparatus and method for manufacturing semiconductor device | — | 2001-09-11 |
| 5928428 | Apparatus and method for manufacturing a semiconductor device | — | 1999-07-27 |
| 5882418 | Jig for use in CVD and method of manufacturing jig for use in CVD | Atsuhiro Fujii, Kazuo Kobayashi, Hiroshi Ohnishi, Seiichi Mimura | 1999-03-16 |