Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501118 | Semiconductor device having conducting material film formed in trench, manufacturing method thereof and method of forming resist pattern used therein | Hiroshi Matsubara | 2002-12-31 |
| 6306699 | Semiconductor device having conducting material film formed in trench, manufacturing method thereof and method of forming resist pattern used therein | Hiroshi Matsubara | 2001-10-23 |