Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7063922 | Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof | Takaei Sasaki, Noriyuki Harashima, Satoshi Aoyama | 2006-06-20 |
| 7001698 | Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof | Takaei Sasaki, Noriyuki Harashima, Satoshi Aoyama | 2006-02-21 |
| 6881991 | Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof | Satoshi Aoyama, Takaei Sasaki, Noriyuki Harashima | 2005-04-19 |
| 6685848 | METHOD AND APPARATUS FOR DRY-ETCHING HALF-TONE PHASE-SHIFT FILMS HALF-TONE PHASE-SHIFT PHOTOMASKS AND METHOD FOR THE PREPARATION THEREOF AND SEMICONDUCTOR CIRCUITS AND METHOD FOR THE FABRICATION THEREOF | Takaei Sasaki, Noriyuki Harashima, Satoshi Aoyama | 2004-02-03 |
| 6391791 | Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and methods for the fabrication thereof | Takaei Sasaki, Noriyuki Harashima, Satoshi Aoyama | 2002-05-21 |