Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101150 | Wafer grinding apparatus and wafer grinding method | Kazunari Nakata | 2021-08-24 |
| 10649338 | Stepped wafer and method for manufacturing stepped wafer | — | 2020-05-12 |
| 10073360 | Edge exposure apparatus | Shoichi KUGA | 2018-09-11 |
| 5594922 | System for monitoring a library unit shared as input/output with higher level unit wherein abnormal occupation of library by a higher level unit is reset | Yoshio Suzuki | 1997-01-14 |