Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6130481 | Semiconductor integrated circuit interconnection structures and method of making the interconnection structures | Shigeru Harada, Akira Ihisa, Hiroshi Mochizuki, Eisuke Tanaka | 2000-10-10 |
| 5712509 | Semiconductor integrated circuit interconnection structures | Shigeru Harada, Akira Ohisa, Hiroshi Mochizuki, Eisuke Tanaka | 1998-01-27 |
| 4913090 | Chemical vapor deposition apparatus having cooling heads adjacent to gas dispersing heads in a single chamber | Shigeru Harada, Masanori Obata, Eisuke Tanaka | 1990-04-03 |