Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9296842 | Polymer for lithography | Atsushi Yasuda, Tomoya Oshikiri, Daisuke Matsumoto, Shinichi Maeda | 2016-03-29 |
| 9109060 | Method for producing polymer, polymer for lithography, resist composition, and method for producing substrate | Atsushi Yasuda, Tomoya Oshikiri, Daisuke Matsumoto, Shinichi Maeda | 2015-08-18 |
| 9023578 | Copolymer for lithography and method for evaluating the same | Shinichi Maeda, Daisuke Matsumoto | 2015-05-05 |