Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424168 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus involving thickness measurements | Kazuaki Mikami, Haruhiko MINAMITAKE | 2022-08-23 |
| 9691619 | Laser annealing device with multiple lasers | Tadaharu Minato, Yusuke Kawase | 2017-06-27 |
| 9673308 | Semiconductor device manufacturing method | Yusuke Kawase, Tadaharu Minato | 2017-06-06 |