Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5319246 | Semiconductor device having multi-layer film structure | Takako Nagamine, Toru Koyama | 1994-06-07 |
| 5200808 | Semiconductor device having smooth contact holes formed through multi-layer insulators of different etching speeds | Toru Koyama, Takako Nagamine | 1993-04-06 |