Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197600 | Information processing apparatus, information processing method and program | Keiko Ojima, Hiromi Kaneko, Hiroaki Sadata | 2025-01-14 |
| 5914000 | Apparatus for manufacturing semiconductor device and method of removing silicon oxidation film | — | 1999-06-22 |
| 5607515 | Method of cleaning CVD apparatus | — | 1997-03-04 |
| 5584963 | Semiconductor device manufacturing apparatus and cleaning method for the apparatus | — | 1996-12-17 |
| 5517943 | Vacuum CVD apparatus | — | 1996-05-21 |
| 5365772 | Leak detection in a reduced pressure processing apparatus | Yasuhiro Ueda | 1994-11-22 |